X-eye SF160 Series
2D & 3D Micro CT System
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Non-destructive analysis of semiconductor, SMT, and electron/electric components
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Hybrid Tube – filament(consumable) lifespan 10,000hrs
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Dual CT – High-quality CT image / high speed scan
Best performance X-ray Inspection System High-performance Micro-focus Open Tube with 160kV is installed and fine defects of 1㎛ are detectable. High-resolution X-ray image can be gained with world best magnification by installing high-price Open Tube as standard. Dual CT function can be purchased additionally, and exact location & size of defects can be detected and analyzed with this function. |
Specifications
X-ray Tube | 160 kV / 200 µA (option 160 kV / 500 µA) |
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Min. Resolution | 0.9 µm (tungsten) / 0.8 µm (CeB6) |
Table Size | 460 X 510 mm (option 550 X 650 mm) |
AXIS | X, Y, Z, Tilt (70º), R, Y-aft, Cone beam R |
Detector | 5 inch Pixel FPD |
CT Scan Method | Oblique CT / Cone beam CT |
Foot print | 1,340mm x 1,460mm x 1,670mm |
Weight | 2,000kg |