SEM accessories

Ion Sputter Coater


– Target use limit : 3,000 times

– Size of the target : ∅ 50mm

– Sample table interval : 35mm – 55mm

– Size of the coating chamber : ∅ 120 mm x 65mm

– Target material :  Au, Pt(Option)

– Product size : 1180(W) x 310(D) x 310(H)

EDS(Energy Dispersive Spectroscopy)

Spectroscopy solution 

– SSD Type: No LN2 required

– Able to analyze light elements with good resolution

– Provides reliable weight or atomic based quantitative elemental analysis results

– User-friendly interface with fast and simple manipulation

Main functionsinclude Elemental Mapping, Point Analysis, Line Scan, Automated Reporting