SEM accessories
Ion Sputter Coater
Specification
– Target use limit : 3,000 times
– Size of the target : ∅ 50mm
– Sample table interval : 35mm – 55mm
– Size of the coating chamber : ∅ 120 mm x 65mm
– Target material : Au, Pt(Option)
– Product size : 1180(W) x 310(D) x 310(H)
EDS(Energy Dispersive Spectroscopy)
Spectroscopy solution
– SSD Type: No LN2 required
– Able to analyze light elements with good resolution
– Provides reliable weight or atomic based quantitative elemental analysis results
– User-friendly interface with fast and simple manipulation
Main functionsinclude Elemental Mapping, Point Analysis, Line Scan, Automated Reporting