SiC
FEATURES
• Etching Acid/Alakaline/ Other cleaning
- Cathode Type 400~500pcs/month possible
- Seed and other products
• Surface Polishing
- Cathode Type 100~150pcs (40%)
- Ring Type 400~450pcs (60%)
• Ultrasonic Drilling Ceramic, Quartz, Si, SiC hole process
- Cathode Type 200pcs
• Elastomer Bonding Si-Carbon
- Cathode Type 100~200pcs(8-inch cathode/HP/HPT/300mm inner-outer)
SPECIFICATION
| Desscription | Equipment | P/N | Dismension | Photo |
|---|---|---|---|---|
| 6″ | Aliance | 839-011906-100 | S:OD172.7/ T6.35 G:19T |
 |
| 839-011906-001 | ||||
| 839-011906-902 | ||||
| 8″ | Rainbow | 839-011907-001 | S: OD 223.52/ T6.35 G:19T |
 |
| Exelan | 839-011907-100 | |||
| 839-011907-334 | ||||
| 839-011907-411 | ||||
| 839-011907-902 | ||||
| Thicker | 839-011907-222 | S: OD 223.52/ T 8.9 G :19T | ||
| 8″ | Exelan HPT | 839-443215-502 | S :OD 262.89 / T 9.53 G : T 16.5 |  |
| 839-443215-504 | ||||
| 839-443215-544 | ||||
| 8″ | Exelan HP | 839-443215-101 | S :OD 262.89 / T 9.53 G :T 19.05 |  |
| 8″ | INNER/OUTER | Inner 716-069688-005 | INNER S : OD 309.1 T 10.25+ G6.35 OUTER S :ID 309.57 OD :431.8 T S10.9+G10.16 |  |
| 8”Si Focus Ring | TEL | 1D10-309946-12 | OD260 /ID203/T3.4 | |
| 12”Si Focus Ring | APPLIED MATERIALS | 2L10-255346-11 | OD360/ID297/T3.4 | |