Engieering Services
Evaporation cell overhaul
FEATURES
• Sunic Cell
• Tokki Cell
• Ulvac Cell
• Veeco Cell
• etc.
Evporation cell overhaul Service
Ozone Generator Overhaul
Repairable Model
• AX8200
• AX8403
• AX8407, AX8407(A)
• AX8560~7100
Generator Overhaul Process
Photo & Litho Parts
Services Lists
• Photo & Litho part sales
• Photo & Litho repair
• Lens Optimization & Cleaning
• Track Parts Repair & Overhaul
Generator Overhaul Process
Refurbish & Modify
Services Lists
– Sputter : Applied, Varian, Ulvac, Novellus, Sunic, etc.
– CVD : Applied, TEL, Novellus, IPS, etc.
– Photo & Litho (Stepper, E-beam Lithography) : Nikon, Cannon, Jeol
– Track : TEL MK-2, V, VZ, 7, 8
– OLED : Evaporator, Source, Cell, Aligner, Encapsulation(Thin Film, Glass, Metal), Tokki, Ulvac, Sunic, SNU, etc.
– Ion Implant : Applied, Varian, Axcelis, etc.
– Furnace : TEL, Kokusai, etc.
– Etcher : TEL, Kokusai, etc.
Set-up & Relocation
Services Lists
– Set-up : OLED Full Line, LCD Line, Photo & Litho, Track, Sputter, CVD, Furnace, Solar Module Line, LED Line, Semiconductor, etc.
– Relocation : OLED Full Line, LCD Line, Photo & Litho, Track, Sputter, CVD, Furnace, Solar Module Line, LED Line, etc.
– Disassemble : Photo & Litho, Track, Sputter, CVD(MOCVD, PECVD), Furnace
Upgrade
Services Lists
– Equipment Upgrade : OLED, Ion Implant, Stepper, Track, Sputter(Heater, Gun, Target, etc.), CVD, etc.
– Photo & Litho : Lens Optimization, Wafer Size Change, He- Ne laser head optimize, Semiconductor => LED Production, etc.
– Track : Coater <=> develop change, Interface modify, Hot plate modify, etc.