공정 장비
대량생산 장비 (Process)
장비 목록
– Sputter : Inline Sputter, ITO Sputter, etc.
– CVD : CVD, PECVD, MOCVD, ALD, APCVD
– OLED Evaporation & Encapsulation
– Furnace : Thermal Furnace, High Temp Furnace
– Etcher : Dry Etcher
– Stepper & Track : Semiconductor, LED
대량생산 장비 (Other)
장비 목록
– Transfer Module Chamber
– Auto align System
– 검사 시스템 : In-Line X-ray, X-ray 3D CT, Test, SEM
– Tab Potting System
– ACF Bonder
– Flip Chip Bonder
R&D 장비
장비 목록
– Sputter : Inline Sputter, ITO Sputter, etc.
– CVD : CVD, PECVD, MOCVD, ALD
– OLED Evaporation & Encapsulation
– Furnace : Thermal Furnace, High Temp Furnace
– Stepper & Track : Semiconductor, LED
– Plasma Reactor : R&D
– RF Power & Microwave Module
– Transfer Module Chamber
– Auto align System
– 검사 시스템 : X-ray, Test