엔지니어링 서비스
Evaporation cell overhaul
가능 모델
– Sunic Cell
– Tokki Cell
– Ulvac Cell
– Veeco Cell
– etc.
Evaporation cell overhaul Service
Ozone Generator Overhaul
가능 모델
– AX8200
– AX8403
– AX8407, AX8407(A)
– AX8560 ~ 7100
Generator Overhaul Process
Photo & Litho- Parts
서비스 목록
– Photo & Litho 부품 판매
– Photo & Litho 부품 수리
– Lens Optimization & Cleaning
– Track Parts Repair & Overhaul
Photo & Litho- 재정비 & 재배치
Refurbish & Modify
서비스 목록
– Sputter : Applied, Varian, Ulvac, Novellus, Sunic, etc.
– CVD : Applied, TEL, Novellus, IPS, etc.
– Photo & Litho (Stepper, E-beam Lithography) : Nikon, Cannon, Jeol
– Track : TEL MK-2, V, VZ, 7, 8
– OLED : Evaporator, Source, Cell, Aligner, Encapsulation(Thin Film, Glass, Metal), Tokki, Ulvac, Sunic, SNU, etc.
– Ion Implant : Applied, Varian, Axcelis, etc.
– Furnace : TEL, Kokusai, etc.
– Etcher : TEL, Kokusai, etc.
설치 및 이전
서비스 목록
– 설치 : OLED Full Line, LCD Line, Photo & Litho, Track, Sputter, CVD, Furnace, Solar Module Line, LED Line, Semiconductor, etc.
– 이전 : OLED Full Line, LCD Line, Photo & Litho, Track, Sputter, CVD, Furnace, Solar Module Line, LED Line, etc.
– 분해 : Photo & Litho, Track, Sputter, CVD(MOCVD, PECVD), Furnace
Upgrade
서비스 목록
– 장비 업그레이드 : OLED, Ion Implant, Stepper, Track, Sputter(Heater, Gun, Target, etc.), CVD, etc.
– Photo & Litho : Lens Optimization, Wafer Size Change, He- Ne laser head optimize, Semiconductor => LED Production, etc.
– Track : Coater <=> develop change, Interface modify, Hot plate modify, etc.