Nanotech Digital GmbH offers a variety of PVD process solutions.
Our sputtering system and process solutions from upgrading existing equipment to new process development, consulting, and cost reduction using 2nd Source.
Below image is the “hillock formation” demonstrating that TiOx / Pt is a stable film for subsequent PZT growth on wafers.
Scanning Electron Microscope (SEM) Image
– PZT deposited on Bottom Electrode
Sputtering System Image