Engineering Services

Ozone Generator Overhaul

Repairable Model

– AX8200

– AX8403

– AX8407, AX8407(A)

– AX8560 ~ 7100

Photo & Litho

Services

– Photo & Litho parts sales

– Photo & Litho Parts Repair

– Lens Optimization & Cleaning

– Track Parts Repair & Overhaul

Refurbish & Modify

Services Lists

– Sputter : Applied, Varian, Ulvac, Novellus, Sunic, etc.

– CVD : Applied, TEL, Novellus, IPS, etc.

– Photo & Litho (Stepper, E-beam Lithography) : Nikon, Cannon, Jeol

– Track : TEL MK-2, V, VZ, 7, 8

– OLED : Evaporator, Source, Cell, Aligner, Encapsulation(Thin Film, Glass, Metal), Tokki, Ulvac, Sunic, SNU, etc.

– Ion Implant : Applied, Varian, Axcelis, etc.

– Furnace : TEL, Kokusai, etc.

– Etcher : TEL, Kokusai, etc.

Set-up & Relocation

Services Lists

– Set-up : OLED Full Line, LCD Line, Photo & Litho, Track, Sputter, CVD, Furnace, Solar Module Line, LED Line, Semiconductor, etc.

– Relocation : OLED Full Line, LCD Line, Photo & Litho, Track, Sputter, CVD, Furnace, Solar Module Line, LED Line, etc.

-Disassemble : Photo & Litho, Track, Sputter, CVD(MOCVD, PECVD), Furnace

Upgrade

Services Lists

– Equipment Upgrade : OLED, Ion Implant, Stepper, Track, Sputter(Heater, Gun, Target, etc.), CVD, etc.

– Photo & Litho : Lens Optimization, Wafer Size Change, He- Ne laser head optimize, Semiconductor => LED Production, etc.

– Track : Coater <=> develop change, Interface modify, Hot plate modify, etc.