Nanotech Digital GmbHoffers a variety of PVD process solutions.
Our sputtering system and process solutions from upgrading existing equipment to new process development, consulting, and cost reduction using 2nd Source.
Below image is the “hillock formation” demonstrating that TiOx / Pt is a stable film for subsequent PZT growth on wafers.
Scanning Electron Microscope (SEM) 이미지
– PZT deposited on Bottom Electrode
Sputtering System 이미지