에너지 절약 기술
Nanotech Digital GmbH offers various cost saving technology for customers.
Our technology has energy savings, material change, process change, 2nd source development, outsourcing, etc.
This is one of our energy saving technology “Dry pump Energy saving tools”. It is used for helping Dry pumps’ energy savings.
Dry Pump with Decompression using fluid flow acceleration effect
- Apparatus in order to save power consumption of dry pump in semiconductor fabrication line
- Maximum 55 % of power and 50% N2 consumption saving
- Easy installation at the exhaust line of dry pump- Only additional
- compressed air is required
- No maintenance is necessary